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Anisotropic etching of silicon

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2 Author(s)
Bean, K.E. ; Texas Instruments, Inc., Dallas, TX ; Bean, K.E.

Anisotropic etching of silicon has become an important technology in silicon semiconductor processing during the past ten years. It will continue to gain stature and acceptance as standard processing technology in the next few years. Anisotropic etching of

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Electron Devices, IEEE Transactions on  (Volume:25 ,  Issue: 10 )