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The attenuation of an optical guided wave can be ascribed mainly to two mechanisms: surface scattering and bulk absorption. Scattering losses have been an impediment in the development of active integrated optical devices. Measurements of attenuation coefficients at 6328Å in ZnO films grown epitaxially by chemical vapor deposition on sapphire substrate will be presented. After polishing the films, losses as low as ∼ 1 db/cm have been observed for low order modes.