A thin-film diode strain sensor
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A new type of thin-film strain sensor has been conceived. This sensor is a p-n heterojunction diode utilizing polycrystalline semiconductor layers obtained by vacuum evaporation onto an insulating substrate. The device exhibits large shifts in its forward I-V characteristic when subjected to a mechanical strain, and thus functions as a low output impedance voltage source.
Published in:
Electron Devices Meeting, 1968 International
(Volume:14
)
Date of Conference: 1968