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A high-voltage CMOS VLSI programmable fluidic processor chip

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7 Author(s)
Current, K. ; California Univ., Davis, CA, USA ; Yuk, K. ; McConaghy, C. ; Gascoyne, P.
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A high-voltage (HV) SOI CMOS VLSI chip has been demonstrated to transport droplets on programmable paths across its coated surface. This HV exciter for a fluidic lab-on-a-chip system creates dielectrophoretic forces that move and help inject droplets. Electrode excitation voltage and frequency are variable: at 100V, fELECmax = 200Hz. Data communication rate is variable up to 250kHz. This 10,377μm-by-8210μm demonstration chip has a 32×32 array of nominally 100V electrode drivers dissipating 1.87W max.

Published in:

VLSI Circuits, 2005. Digest of Technical Papers. 2005 Symposium on

Date of Conference:

16-18 June 2005

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