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Evaluation of the strain state in SiGe/Si heterostructures by high resolution x-ray diffraction and convergent beam electron diffraction

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8 Author(s)
Suey Li Toh ; Chartered Semicond. Manuf. Ltd., Singapore ; Li, K. ; Ang, C.H. ; Rao, R.
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We have used both convergent beam electron diffraction (CBED) and high-resolution X-ray diffractometry (HRXRD) to investigate the influence of different graded layer thicknesses on the overall and interfacial strain phenomena in the SiGe/Si heterostructures. Broadening of the higher order Laue zone (HOLZ) reflections is often observed at the interface, and contains information relating to the lattice behaviour. These results, when considered and correlated with the plots from HRXRD, allow us to predict the optimized relaxation mechanisms taking place at the interfacial regions.

Published in:

Physical and Failure Analysis of Integrated Circuits, 2005. IPFA 2005. Proceedings of the 12th International Symposium on the

Date of Conference:

27 June-1 July 2005