Cart (Loading....) | Create Account
Close category search window

Digital self-calibration method for MEMS sensors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Colinet, E. ; Dept. of Signal Process. & Electron. Syst., SUPELEC, Gif-sur-Yvette, France ; Juillard, J. ; Nicu, L. ; Bergaud, C.

This paper presents a digital self-calibration method for microelectromechanical systems (MEMS) using a relay-feedback loop and a set of discrete-time filters. This method is based on the measurement of limit-cycles at the comparator's output, which result from a synchronization phenomenon between the natural frequency of the MEMS and the clock frequency of the discrete-time components. We show how quantized information concerning the MEMS parameters may be extracted from the shape of the limit-cycle, which depends on the characteristics of the MEMS (pulsation, damping, etc.). This digital technique is amplitude-independent, relatively insensitive to noise, and not costly to implement. Details concerning its implementation are discussed, and some simulation and experimental results are given.

Published in:

Instrumentation and Measurement, IEEE Transactions on  (Volume:54 ,  Issue: 4 )

Date of Publication:

Aug. 2005

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.