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Digital self-calibration method for MEMS sensors

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4 Author(s)
Colinet, E. ; Dept. of Signal Process. & Electron. Syst., SUPELEC, Gif-sur-Yvette, France ; Juillard, J. ; Nicu, L. ; Bergaud, C.

This paper presents a digital self-calibration method for microelectromechanical systems (MEMS) using a relay-feedback loop and a set of discrete-time filters. This method is based on the measurement of limit-cycles at the comparator's output, which result from a synchronization phenomenon between the natural frequency of the MEMS and the clock frequency of the discrete-time components. We show how quantized information concerning the MEMS parameters may be extracted from the shape of the limit-cycle, which depends on the characteristics of the MEMS (pulsation, damping, etc.). This digital technique is amplitude-independent, relatively insensitive to noise, and not costly to implement. Details concerning its implementation are discussed, and some simulation and experimental results are given.

Published in:

Instrumentation and Measurement, IEEE Transactions on  (Volume:54 ,  Issue: 4 )

Date of Publication:

Aug. 2005

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