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A read-out strategy and circuit design for high frequency MEMS resonators

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6 Author(s)
Uranga, A. ; Electron. Eng. Dept., Univ. Autonoma de Barcelona, Spain ; Barniol, N. ; Campanella, H. ; Esteve, J.
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This paper describes the implementation of read-out circuitry to characterize a MEMS resonator in the UHF band. A read-out strategy is proposed and explained, detailing the requirement issues. Also, the circuit architecture and design are presented. SPECTRE modeling predictions are compared with current characterization results. A transimpedance gain of 70 dB has been verified, with a cut-off frequency of 450 MHz.

Published in:

Circuits and Systems, 2005. ISCAS 2005. IEEE International Symposium on

Date of Conference:

23-26 May 2005