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A novel monolithically fabricated Lorentz force actuator using polymer magnets

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2 Author(s)
M. Feldmann ; Inst. for Microtechnology, Braunschweig Tech. Univ., Germany ; S. Buttgenbach

We present a novel monolithically fabricated electromagnetic actuator/generator based on the Lorentz force principle. The basic build-up consists of electroplated wires held by springs above a structured polymer magnet. This laterally driven electromagnetic micro actuator provides parallel actuation to the substrate surface (in-plane motion). Contrary to systems with a hybrid build-up the presented fabrication process allows a highly flexible definition of magnetic areas and their shapes. This device was simulated, fabricated and successfully tested. Applications are e.g. micro motors, switches, active valves and pumps.

Published in:

INTERMAG Asia 2005. Digests of the IEEE International Magnetics Conference, 2005.

Date of Conference:

4-8 April 2005