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Magnetic patterning of FePt thin films using ion implantation

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3 Author(s)
Aoyama, T. ; TDK Corp., Nagano, Japan ; Sato, I. ; Ishio, S.

In this report, the experimental results of implanting different ions to the specified area using a stencil mask and feasibility of fabricating magnetic pattern with a large coercivity difference were shown.

Published in:

Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International

Date of Conference:

4-8 April 2005