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Modeling the performance of cluster-based fabs

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2 Author(s)
Wood, S.C. ; Center for Integrated Syst., Stanford Univ., CA, USA ; Saraswat, K.C.

The economic performance of cluster tools is evaluated by modeling a hypothetical cluster-based fab, where almost all of a 0.6-μm DRAM (dynamic random-access memory) process flow is performed in cluster tools. A conventional fab under the same cost constraint running the same flow is also modeled as a base for comparison. From this model, a number of inherent differences between cluster-based fabs and conventional fabs are observed and described. Monte Carlo cost-based simulations are then run on the two fabs to compare the potential cost and throughput time performance of the fabs. Results suggest that the cluster-based fab can operate at considerably reduced throughput times for a relatively small cost per wafer premium. Modeling the cluster-based fab revealed a number of fab design and management issues that are much less significant or nonexistent for conventional fabs. These issues include configuration and scheduling, lot size, and scaling the fab

Published in:

Semiconductor Manufacturing Science Symposium, 1991. ISMSS 1991., IEEE/SEMI International

Date of Conference:

20-22 May 1991