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Artificial neural network based macromodeling approach for two-port RF MEMS resonating structures

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4 Author(s)
Yongjae Lee ; Dept. of Electr. & Comput. Eng., Colorado Univ., Boulder, CO, USA ; Yonghwa Park ; Feng Niu ; D. Filipovic

In this paper, we propose an efficient approach for analysis, design, and optimization of two-port radio frequency microelectromechanical systems (RF MEMS) resonating structures. Methodology utilizes finite element method (FEM) for the prediction of electromechanical responses and fast/accurate mapping with an artificial neural networks (ANNs) technique, toward a final goal - a generic macromodel compatible with modern circuit computer aided design (CAD) tools. Thus, instead of using memory and time demanding full-wave analysis or more extensive and expensive design process using multiple fabrication cycles, a simple yet accurate circuit simulator compatible modeling and optimization procedure is developed.

Published in:

Proceedings. 2005 IEEE Networking, Sensing and Control, 2005.

Date of Conference:

19-22 March 2005