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Combination with optical lithography and microwave rapid heating method for the selective-area synthesis of silver nanoparticles on silicon wafer

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4 Author(s)

The ability to fabricate materials and structures with sub-micrometer scale features is interesting in many areas of science and technology [l]. Of importance for many applications in nanotechnology is the ability to arrange nanocrystals into larger-scale patterns with precise lateral control, such as photonic crystal, data storage, and biosensors. Recently, great efforts have also been made on position-controllable assembling of colloidal nanoparticles on solid substrates [2]. Despite the increasing efforts in the past few years, it is still a great challenge to develop an effective way to fabricate well-controllable nanostructures using colloidal as the structural elements.

Published in:

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Date of Conference:

26-29 Oct. 2004

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