Simulation and design of 3D geometric RF IC inductors by novel modeling techniques with magPEEC plus FastCap

This, paper presents a new peec (partial element equivalent circuit)-based inductor simulation tool, entitled L-Simulator, which employs a novel magPEEC modeling algorithm and an existing FastCap modeling algorithm to address both magnetic and electrical coupling effects, respectively, in 3D conductor+magnet+dielectric geometries, hence, being capable to simulate and design 3D magnetic-enhanced RF IC inductors. Applications on micromachined inductors in a 0.2 μm GaAs HEMT process and magnetic-cored micro inductors in a 0.18 μm CMOS technology are discussed.