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Surface-acoustic-wave (SAW) voltage sensor with improved sensitivity

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1 Author(s)
Joshi, S.G. ; Marquette University, Milwaukee, WI, USA

The sensitivity of a surface-acoustic-wave (SAW) voltage sensor can be increased by reducing the thickness of the substrate across which the voltage is applied. Voltage sensitivity of 95 Hz/V has been obtained in a 77-MHz SAW oscillator fabricated on a 71-µm-thick, 728° Y-X LiNbO3substrate.

Published in:

Proceedings of the IEEE  (Volume:72 ,  Issue: 10 )