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Future defense systems will require high-speed microcircuits for analog and digital application. This includes digital devices which will operate with 25-MHz system clock, and contain in excess of 4 × 105gates/cm2. Analog devices operating as transmitters, and receivers of signals up to 150 GHz will also be needed. A fundamental requirments for military systems is that they operate in hostile environments. In particular, they must survive after receiving large doses dose transients of ionizing radiation. Micro and submicron engineering technology impacts each of these requirements. This paper describes the nature of this impact. Research and development in these technology areas at the Naval Research Laboratory is reviewed in this article.