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Lincoln Laboratory is engaged in a wide range of research activities aimed toward the development of a technology base for advanced semiconductor eletronics. This paper is an overview of that research discusses work in the areas of submicrometer lithography and processing, materials growth, circuit testing and restructuring and device research. Specific projects in each of these areas are described in order to depict the overall thrust of the research effort. In addition, some application which successfully utilize advanced technologies are discussed to illustrate the viability of these techniques and the potential performance advantages they afford.