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Much interest has been expressed in the use of GaAs MESFET's for high speed digital integrated circuits (IC's). Propagation delays in the 60- to 90-ps/gate range have been demonstrated by several laboratories on SSI and MSI logic circuits. Recently, large scale digital IC's with over 1000 gates have been demonstrated in GaAs. In this review paper, the device, circuit, and processing approaches presently being explored for high speed GaAs digital circuits are presented. The present performance status of high speed circuits and LSI circuits is reviewed.