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Storage experiments with ultra-high density MNOS capacitors

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2 Author(s)
Raffel, J.I. ; Massachusetts Institute of Technology, Lexington, MA ; Yasaitis, J.A.

Experiments have been performed to determine the feasibility of achieving storage densities greater than 107/in2using MNOS capacitors. Good signal-to-noise ratios have been achieved in arrays of air-isolated storage sites 0.09 mil × 0.15 mil using a voltage ramp for depletion sensing and avalanche breakdown to avoid deep depletion during writing.

Published in:

Proceedings of the IEEE  (Volume:64 ,  Issue: 11 )