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This paper describes a fully integrated CMOS-MEMS pressure sensor implemented in a standard 0.6 μm process from AMS. The fabricated chip includes all necessary components from pressure sensor to A/D-converter and decimation filter. The pressure sensitive diaphragm is fabricated using one single postprocessing step. Theoretical background is provided along with simulated results laying the fundament for the implemented CMOS design. Measured results will be available in short time.
Date of Conference: 1-3 Dec. 2004