By Topic

Monolithic integrated optical detection for microfluidic systems using thin film photodiodes based on amorphous silicon

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

9 Author(s)
Schaefer, H. ; Inst. for Microsyst. Technol., Siegen Univ., Germany ; Seibel, K. ; Walder, M. ; Schoeler, L.
more authors

For the fabrication of micrototal analysis systems (μTAS) methods of micropatterning, sealing, and for the manufacturability, as well as techniques for connecting the microstructures to the macroworld are of particular significance. The idea is to create a monolithic instrument which consists of an assembly of three-dimensional integrated modules (e.g. fluidic networks, electrical and optical sensors, microelectronic circuits) to support the advantage of efficient interconnections. To demonstrate the feasibility of an application specific lab-on-microchip, published in Ref.1, results obtained with a fabricated micro flow cytometer and monolithically integrated optical detectors based on amorphous silicon are reported. In this work, we use an a-Si:H pin diode for the optoelectronic detection of organic fluorescence sensors, namely anthracene derivatives, which are driven through the fluidic channel network hydrodynamically.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005