We present a micro-well array chip operated by negative dielectrophoresis for active positioning control of single cell or microbead. The prototype chip has been designed and fabricated to validate concept feasibility in a 2×2 micro-well array using silicon substrate and PDMS channel structures. We have successfully demonstrated capturing experiments of single polystyrene microbead (15μm) into each micro-well by dielectrophoresis with control electrical signals of 10Vpp at 1 MHz.
Published in:
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Date of Conference: 30 Jan.-3 Feb. 2005