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Single-use microfluidic pumps and valves based on a thermally responsive PDMS composite

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4 Author(s)
Samel, B. ; Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden ; Melin, J. ; Griss, P. ; Stemme, G.

In this work we present active microfluidic liquid handling integrated on-chip with no need for external actuators. The concept is based on a temperature sensitive silicone elastomer composite, consisting of PDMS and expandable microspheres. We successfully fabricated single-use microfluidic pumps and displaced liquids in the range of nanoliters even against counter pressures up to 100kPa. Moreover, liquid flow in a microchannel was entirely blocked by means of integrated valves. The valves could withstand pressures up to 140kPa. The devices were fabricated entirely from low cost materials and allow wafer-level processing to be used.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005

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