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Arrays of cricket-inspired sensory hairs with capacitive motion detection

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6 Author(s)
van Baar, J. ; MESA+ Res. Inst., Twente Univ., Enschede, Netherlands ; Dijkstra, M. ; Wiegerink, R. ; Lammerink, T.
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This paper presents the fabrication of flow-sensors based on the drag-force induced motion of artificial hairs connected to capacitive read-out. Artificial hairs were made either out of moulded silicon-nitride structures or by SU-8. The SU-8 hairs were suspended on membranes containing electrodes to form the variable capacitors. Silicon-rich-nitride hairs were made using a silicon wafer as a dissolvable mould. The longest SU-8 hairs were fabricated using a 470 μm thick photoresist layer. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been carried out on entire arrays and are reported in this paper.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005