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Single chip atomic force microscope

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5 Author(s)
Hafizovic, S. ; Phys. Electron. Lab., Swiss Fed. Inst. of Technol. ETH, Laussane, Switzerland ; Volden, T. ; Kirstein, K.-U. ; Hiedemann, A.
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We report on a standalone single-chip (7 mm by 10 mm) atomic-force microscopy (AFM) unit including a fully integrated array of cantilevers, each of which has its individual actuation, detection, and control unit so that standard AFM operations can be performed just by means of the chip. The on-chip circuitry, which includes analog signal amplification and filtering stages with offset compensation, analog-to-digital converters (ADC), a digital signal processor and a digital interface for data transmission, notably improves the overall system performance. The microsystem characterization evidenced a vertical resolution of better than 1 nm and a force resolution of better than 1 nN as shown in the measurement results.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005