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A dual axis gas gyroscope utilizing low-doped silicon thermistor

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5 Author(s)
Dau, V.T. ; Dept. of Microsystem Technol., Ritsumeikan Univ., Kyoto, Japan ; Shiozawa , T. ; Dao, D.V. ; Kumagai, H.
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This paper presents the design, simulation and fabrication of a dual axis semiconductor gas gyroscope. The sensor configuration consists of a piezoelectric pump and a micro thermal sensing element, packaged in an aluminum case with diameter and length of 14mm and 25mm, respectively. Good agreement between the sensitivity simulation results and the experimental data has been realized. This sensor is to be applied in ship anti-rolling and stabilization systems.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005

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