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A novel fabrication method for hybrid, microfluidic devices

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6 Author(s)
Steinert, C.P. ; IMTEK, Freiburg Univ., Germany ; Schmitt, N. ; Deier, E. ; Daub, M.
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We present a novel fabrication method for hybrid, disposable microfluidic systems. We show its great potential by manufacturing a 24 channel picoliter dispenser, which can be used as disposable for the fabrication of microarrays. Compared to commercially available TopSpot® printheads [Steinert et al., 2004 and Gutmann et al., 2004] silicon area was reduced down to 7% (8×6.4 mm2) and costs were reduced at least by a factor 50. The hybrid disposable assembly consists of a PDMS multilayer containing reservoirs and microchannels (36×20×2 mm3) and a silicon nozzle chip. This way for the first time we were able to realize perfectly sealed high density fluidic interconnects between silicon and PDMS at a pitch of 375 μm. A key for success was the extension of the already known soft lithography and sandwich molding processes for PDMS multilayer fabrication.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005

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