This paper presents a novel method to fabricate polymer microstructures with various aspect ratios from a single rigid template. The fabricated polymer structures have a representative application in cellular force measurements because a set of probing ranges can be easily obtained without using multiple master templates. Two of complicated structures were also fabricated for this application using the same technique, in the view to enhance focal adhesion and to align the cells. This method reported here differs from the existing ones in that it enables the "1-to-n" replication, thereby lowering the fabrication cost and complexity.
Published in:
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Date of Conference: 30 Jan.-3 Feb. 2005