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Fish and chips: single chip silicon MEMS CTDL salinity, temperature, pressure and light sensor for use in fisheries research

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3 Author(s)
Hyldgard, A. ; Dept. of Micro & Nanotechnol., Tech. Univ. of Denmark, Lyngby, Denmark ; Hansen, O. ; Thomsen, E.V.

A single-chip silicon MEMS CTDL multi sensor for use in aqueous environments is presented. The new sensor chip consists of a conductivity sensor based on platinum electrodes (C), an ion-implanted thermistor temperature sensor (T), a piezoresistive pressure sensor (D for depth/pressure) and an ion-implanted p-n junction light sensor (L). The design and fabrication process is described. A temperature sensitivity of 0.8 × 10-3K-1 has been measured and detailed analysis of conductivity measurement data shows a cell constant of 81 cm-1.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005