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A monolithic integrated array of out-of-plane hot-wire flow sensors and demonstration of boundary-layer flow imaging

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4 Author(s)
Chen, J. ; Micro & Nanotechnology Lab., Illinois Urbana-Champaign Univ., IL, USA ; Engel, J. ; Nannan Chen ; Liu, C.

We report the development of an out of plane hot wire flow sensor array fabricated using robust three dimensional assembly. The sensor is monolithically integrated with a commercial JFET operational amplifier and operates in constant temperature mode. Output response to airflow has been measured and we have applied the hot wire anemometer array for flow imaging.

Published in:
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference: 30 Jan.-3 Feb. 2005

Page(s):
299 - 302
ISSN :
1084-6999
Print ISBN:
0-7803-8732-5
INSPEC Accession Number:
8477257
Digital Object Identifier :
10.1109/MEMSYS.2005.1453926
Product Type:
Conference Publications

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