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Support loss in micromechanical disk resonators

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2 Author(s)
Zhili Hao ; Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Ayazi, F.

In light of recent efforts to implement micromechanical resonators with high-Q and high frequency, an analytical model for support loss in micromechanical disk resonators has been developed and verified with experimental results. The derived model is general and applicable to various structures and support schemes (side-supported and center-supported disks), providing significant insight to the geometrical design and choice of materials in high-Q disk resonant structures. The methodology presented in this paper can be extended to evaluate support loss in other high-frequency bulk-mode structures such as length-extensional blocks and bars.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005