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Thermally tunable optical thin-film filters with sub-nanometer resolution and 41.7 nm continuous tuning range

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2 Author(s)
D. Hohlfeld ; IMTEK - Inst. of Microsystem Technol., Freiburg Univ., Germany ; H. Zappe

A MEMS-based, tunable optical filter with a transmission linewidth of 0.28 nm, continuously tu nable over a spectral range of 41.7 nm, is presented. The thin film interference filter employs a solid-state silicon cavity and silicon-based distributed Bragg reflectors (DBR). Tuning is achieved by varying the optical resonator thickness through thermal modulation. The filter is configured as a membrane and operates up to a temperature of 450 °C. Such a filter is essential for monitoring and reconfiguration of optical data communication networks and is also applicable for gas sensing.

Published in:

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005.

Date of Conference:

30 Jan.-3 Feb. 2005