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Self-aligned vertical electrostatic comb drives for scanning micromirrors

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4 Author(s)
Tsou, C. ; Dept. of Autom. Control Eng., Feng Chia Univ., Taichung, Taiwan ; Lin, W.T. ; Fan, C.C. ; Chou, B.C.S.

A novel method for fabricating a self-aligned electrostatic dual comb drive using a multi-layer SOI process has been developed. The present method utilizes four aligned masks greatly simplifying the existing SOI-MEMS fabrication methods for manufacturing high performance scanning micromirrors. Results from the micromirror device for the novel vertical comb drives show that a mechanical tilt angle of ±1° at 100 VDC was achieved for a 450 μm diameter micromirror. The scanning micromirror can scan a large angle 62° at the resonance frequency of 10.46 KHz with a sinusoidal voltage input of 60 V in amplitude.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005