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A novel method for fabricating a self-aligned electrostatic dual comb drive using a multi-layer SOI process has been developed. The present method utilizes four aligned masks greatly simplifying the existing SOI-MEMS fabrication methods for manufacturing high performance scanning micromirrors. Results from the micromirror device for the novel vertical comb drives show that a mechanical tilt angle of ±1° at 100 VDC was achieved for a 450 μm diameter micromirror. The scanning micromirror can scan a large angle 62° at the resonance frequency of 10.46 KHz with a sinusoidal voltage input of 60 V in amplitude.