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A MEMS array for pneumatic conveyor and its control based on distributed system

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4 Author(s)
Fukuta, Y. ; IIS, Tokyo Univ., Japan ; Chapuis, Y.A. ; Mita, Y. ; Fujita, H.

In this paper, a pneumatic conveyor and its control mode are proposed for tiny object manipulation. The conveyor consists of a 2D array of 560 air-nozzle actuators realized by the silicon MEMS technology. A distributed control method, based on local air-flow force application, has been developed and successfully validated. Experimental and characterization results are finally presented and analyzed.

Published in:
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference: 30 Jan.-3 Feb. 2005

Page(s):
40 - 43
ISSN :
1084-6999
Print ISBN:
0-7803-8732-5
INSPEC Accession Number:
8477210
Digital Object Identifier :
10.1109/MEMSYS.2005.1453862
Product Type:
Conference Publications

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