IEEE.org| IEEE Xplore Digital Library| IEEE Standards| IEEE Spectrum| More Sites

Cart (Loading....) | Create Account | 

Close category search window
Author Searchbeta |  Advanced Search  |  Preferences |  Search Tips  |  More Search Options  
 
Browse Journals & Magazines > Electron Device Letters, IEEE ...> Volume:13 Issue:5 Help

Contactless characterization of semiconductor devices using surface photocharge effect

Full Text Sign-In or Purchase

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing! close button
puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Das, P. ; Dept. of Electr. Comput. & Syst. Eng., Rensselaer Polytech. Inst., Troy, NY, USA ; Mihailov, V. ; Ivanov, O. ; Gueorgiev, V.
more authors

A technique for evaluating electrical properties of semiconductor wafers and devices using the surface photocharge effect caused by laser radiation is proposed. The measurement setup used in the experiments is presented along with some preliminary results. In particular, experimental results are presented for MOS devices on silicon under bias. It is possible to distinguish from the experimental plots the depletion, accumulation, and inversion regions of the device. Information could be obtained from these curves in a manner analogous to CV plots.<>

Published in:
Electron Device Letters, IEEE  (Volume:13 ,  Issue: 5 )

Date of Publication: May 1992

Page(s):
291 - 293
ISSN :
0741-3106
INSPEC Accession Number:
4175793
Digital Object Identifier :
10.1109/55.145057
Product Type:
Journals & Magazines
Date of Current Version :
06 August 2002
Issue Date :
May 1992
Sponsored by :
IEEE Electron Devices Society

IEEE Account

Purchase Details

Profile Information

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.