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Hot-carrier effects on interface-trap capture cross sections in MOSFETs as studied by charge pumping

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4 Author(s)
Chen, W. ; Yale Univ., New Haven, CT, USA ; Balasinski, Artur ; Zhang, B. ; Ma, T.-P.

A rapid charge-pumping method was used to measure the interface-trap parameters in MOSFETs. The geometric mean of the electron and hole interface-trap capture cross sections decreases significantly (as much as two orders of magnitude) after Fowler-Nordheim (F-N) injection, and gradually recovers toward its original value. This effect is consistent with the interface-trap transformation process observed in MOS capacitors.<>

Published in:
Electron Device Letters, IEEE  (Volume:13 ,  Issue: 4 )

Date of Publication: April 1992

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