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Point-contact pseudo-MOSFET for in-situ characterization of as-grown silicon-on-insulator wafers

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2 Author(s)
Cristoloveanu, S. ; Lab. de Phys. de Composants a Semicond., Grenoble, France ; Williams, S.

A pseudo-MOS transistor can be activated in as-grown silicon-on-insulator (SOI) structures without any device processing by using point-contact probes. The measurement setup for in-situ operation and typical transistor characteristics are presented. Parameters are extracted which relate to minority and majority carriers, buried oxide, and the Si-SiO/sub 2/ interface.<>

Published in:
Electron Device Letters, IEEE  (Volume:13 ,  Issue: 2 )

Date of Publication: Feb. 1992

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