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A utility-based integrated system for process simulation

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7 Author(s)
Scheckler, E.W. ; Electron. Res. Lab., California Univ., Berkeley, CA, USA ; Wong, A.S. ; Wang, R.H. ; Goodwin Chin
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An integrated process simulation system which uses functional utilities to integrate disparate 2-D simulation tools is described. The software utilities provide mechanisms for simulator input generation and user interaction, for mapping between different cross-section formats, and for output visualization. The specific utilities are described. With this approach, several process simulators for lithography, etching, deposition, and thermal processing have been integrated into a unified system, SIMPL-IPX (simulation of profiles from the layout-integrated process simulation environment with X-Windows). Simulation examples for metal l planarization, bipolar technology with a polysilicon , collector 5 plug, and advanced lithography are presented to demonstrated 7 the usefulness of this approach to technology CAD tool 8 integration. Methods for improved data management using 9 a CAD framework are described

Published in:

Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on  (Volume:11 ,  Issue: 7 )

Date of Publication:

Jul 1992

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