By Topic

CF4 decompositions using streamer- and glow-mode in dielectric barrier discharges

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Yongho Kim ; Korea Inst. of Machinery & Mater., Daejeon, South Korea ; Kwan-Tae Kim ; Min Suk Cha ; Young-Hoon Song
more authors

A Dielectric barrier discharge (DBD) is a promising candidate to remove carbon tetrafluoride (CF4) because the DBD has been successfully used for generating ozone (O3) and decomposing nitrogen oxide (NO). A streamer- and glow-mode operations of DBD were carried out in a coaxial cylinder reactor by coupling 10-kHz alternate current (ac) power. The effect of oxygen on the CF4 decompositions was investigated and the optimum oxygen concentrations were found. We compared N2-streamer, N2-glow, and He-glow modes operated in a DBD to investigate the effect of plasma mode on CF4 removal. The results showed that the most efficient CF4 removal was obtained in He-glow mode, while N2-streamer and N2-glow modes demonstrated similar performances. With a practical point of view, we investigated an optimized geometrical configuration of streamer discharge. A micro hole-size perforated DBD showed significant increases in CF4 removal efficiency compared to the normal N2-streamer mode.

Published in:

IEEE Transactions on Plasma Science  (Volume:33 ,  Issue: 3 )