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A Dielectric barrier discharge (DBD) is a promising candidate to remove carbon tetrafluoride (CF4) because the DBD has been successfully used for generating ozone (O3) and decomposing nitrogen oxide (NO). A streamer- and glow-mode operations of DBD were carried out in a coaxial cylinder reactor by coupling 10-kHz alternate current (ac) power. The effect of oxygen on the CF4 decompositions was investigated and the optimum oxygen concentrations were found. We compared N2-streamer, N2-glow, and He-glow modes operated in a DBD to investigate the effect of plasma mode on CF4 removal. The results showed that the most efficient CF4 removal was obtained in He-glow mode, while N2-streamer and N2-glow modes demonstrated similar performances. With a practical point of view, we investigated an optimized geometrical configuration of streamer discharge. A micro hole-size perforated DBD showed significant increases in CF4 removal efficiency compared to the normal N2-streamer mode.