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Rutile structure TiO2 buffer layers and YBa2Cu3O7-x (YBCO) thin films have been deposited on (100) MgO substrates by RF magnetron sputtering. It was found that, high quality c-axis oriented YBCO thin films could be obtained on MgO with very thin  oriented rutile structure TiO2 buffer layers. The crystal structure of TiO2 thin films changed from (100) oriented anatase structure TiO2 to  oriented rutile structure TiO2 with increasing substrate temperature. The  oriented rutile structure TiO2 thin films deposited with the optimal deposition condition had smooth surfaces. YBCO thin films on  oriented rutile structure TiO2 buffer layers had better crystallinity and surface flatness than YBCO thin films deposited on bare MgO substrates.