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YBCO thin films on TiO2 buffer layer deposited by RF magnetron sputtering

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10 Author(s)
Nakamura, Y. ; Hachnohe Nat. Coll. of Technol., Japan ; Isozaki, Y. ; Miura, M. ; Kuroiwa, T.
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Rutile structure TiO2 buffer layers and YBa2Cu3O7-x (YBCO) thin films have been deposited on (100) MgO substrates by RF magnetron sputtering. It was found that, high quality c-axis oriented YBCO thin films could be obtained on MgO with very thin [110] oriented rutile structure TiO2 buffer layers. The crystal structure of TiO2 thin films changed from (100) oriented anatase structure TiO2 to [110] oriented rutile structure TiO2 with increasing substrate temperature. The [110] oriented rutile structure TiO2 thin films deposited with the optimal deposition condition had smooth surfaces. YBCO thin films on [110] oriented rutile structure TiO2 buffer layers had better crystallinity and surface flatness than YBCO thin films deposited on bare MgO substrates.

Published in:

Applied Superconductivity, IEEE Transactions on  (Volume:15 ,  Issue: 2 )

Date of Publication:

June 2005

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