Referenced Items are not available for this document.
We have fabricated Nb-based superconducting tunnel junctions (STJs) with Al trapping layers using the photosensitive polyimide insulation layer for X-ray detector. It is possible to simplify the fabrication process of the STJs, because the photosensitive polyimide is used as the insulation layer instead of conventional inorganic insulation films without an etching process in a vacuum chamber. The polyimide insulation layer expects to be stable for thermal cycling between 0.3 K and room temperature. The preliminary experiments of 5.9 keV radiation shows the energy resolution of 86 eV.
Published in:
Applied Superconductivity, IEEE Transactions on
(Volume:15
,
Issue:
2
)
Date of Publication: June 2005
- Page(s):
- 606 - 608
- ISSN :
- 1051-8223
- INSPEC Accession Number:
- 8484930
- Digital Object Identifier :
- 10.1109/TASC.2005.849955
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 13 June 2005
- Issue Date :
- June 2005
- Sponsored by :
- The IEEE Council on Superconductivity
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