Cart (Loading....) | Create Account
Close category search window

Efficient fabrication process for superconducting integrated circuits using photosensitive polyimide insulation layers

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

9 Author(s)
Kikuchi, K. ; Nat. Inst. of Adv. Ind. Sci. & Technol., Ibaraki, Japan ; Goto, M. ; Nakagawa, H. ; Segawa, S.
more authors

Photosensitive polyimide insulation layers have been introduced to fabricate superconducting integrated circuits. It is shown to simplify the fabrication process, because the photosensitive polyimide insulation layer can be patterned by conventional photolithography process, resulting in the etching process unnecessary in the present new fabrication process. Three kinds of contact hole (junction top electrode contact, junction base electrode contact, and resistor contact) are simultaneously formed in the photolithography process of the polyimide. A minimum contact hole size is designed to be 1.5 μm square for a 3 μm × 3 μm squared junction. Superconducting current density of 2.4×106 A/cm2 of the contact hole was measured. Palladium resistors were successfully made with through hole contacts of the photosensitive polyimide insulation layer. We demonstrated superconducting integrated circuits using this new fabrication process including the minimum 3 μm × 3 μm squared Nb/Al-AlOx/Nb Josephson tunnel junction. The circuit operation is also demonstrated in the fabricated superconducting integrated circuits with the photosensitive polyimide insulation layers.

Published in:

Applied Superconductivity, IEEE Transactions on  (Volume:15 ,  Issue: 2 )

Date of Publication:

June 2005

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.