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The case for near real-time production scheduling in a highly automated semiconductor manufacturing environment

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2 Author(s)
Govind, N. ; Intel Corp., Chandler, AZ ; Iyer, B.

The problem of scheduling wafer lots on tools in the semiconductor fabrication facility is considered. We look at the role of scheduling in the organization and identify some of the major factors that make this problem difficult to solve in the current environment. From a semiconductor manufacturing perspective, the real drivers for pursuing scheduling are identified, as we attempt to make the case for investment in solving the near real-time scheduling problem. We also take a look at some of the manufacturing requirements and the implications that these requirements have on the solution methodology. Finally, we take a brief look at some of the existing work on scheduling in the semiconductor fab and try to identify gaps that freed to be closed for the widespread use of scheduling in this industry

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 2005 IEEE/SEMI

Date of Conference:

11-12 April 2005