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During the packaging of optoelectronic devices, a problem always met is the instability of output power. The main effect causing this problem, Fabry-Perot interference, is discussed in this paper. Both theoretical analysis and experimental test are carried out and are in good agreement. As an example of avoiding the disadvantage of Fabry-Perot interference, the packaging process of a silicon-on-insulator (SOI) based, variable optical attenuator (VOA) is shown.