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Numerical analysis of pull-in voltage in contact MEMS switch with double actuated electrodes

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7 Author(s)
Ling Jiang ; Dept. of Electron. Sci. & Technol., East China Normal Univ., Shanghai, China ; Yanling Shi ; Yun Liu ; Zheng Ren
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This paper presents the numerical analysis of pull-in voltage for a contact MEMS switch with a couple of electrodes. The lumped-model for double actuated coupled parallel-plate actuators is applied to describe the pull-in phenomenon. And based on the pull-in analysis results, some optimizing approaches are developed to lower the pull-in voltage for a contact MEMS switch.

Published in:

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on  (Volume:3 )

Date of Conference:

18-21 Oct. 2004