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The research on MEMS fang-bar fluidic angular rate sensor

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3 Author(s)
Kai Yang ; Inst. of Microelectron., Peking Univ., Beijing, China ; Jian Zhou ; Guizhen Yan

Fluidic angular rate sensors are based on the principle that moving air changes its velocity distribution under the influence of the Coriolis force. However, existing fluidic angular rate sensors are fabricated by traditional machining methods, and are consequently of great volume. Thus, their uses are limited to a great extent. The paper presents a novel micromachined fluidic angular rate sensor, the fang-bar fluidic angular rate sensor, which is fabricated by MEMS technology. Its key components are 4 fang-bar fluidic diodes. The paper theoretically explains the working principle of this sensor in detecting angular rate, and simulates it using finite element analysis software, ANSYS, and finally presents the design of the manufacturing process.

Published in:

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on  (Volume:3 )

Date of Conference:

18-21 Oct. 2004