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Analysis of a MEMS gyroscope interface circuit

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4 Author(s)
Wang Hulquan ; Dept. Inf. & Electron. Eng, Zhejiang Univ., Hangzhou, China ; Jin Zhonghe ; Jiao Jiwei ; Wang Yueling

The interface circuit of a MEMS gyroscope is analyzed in this paper. The gyro works at atmospheric pressure, driven by electronic magnetic force, and sensed by capacitance. The equivalent models of the gyro and the circuits are set. The performance of the gyro system is analyzed and optimized with the model. As a result, the system performance is significantly improved. The gyro's resolution reaches 0.05 °/s, with full scale value 150 °/s, scale factor 9.8 mV/( °/s), nonlinearity 0.43%, and bias drift 3.06°/s /h.

Published in:

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on  (Volume:3 )

Date of Conference:

18-21 Oct. 2004

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