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Influence of adsorption-desorption on resonant frequency of micro- and nanocantilevers

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3 Author(s)
Wang Ping ; Key Lab. of MEMS, Southeast Univ., Nanjing, China ; Qing-An Huang ; Yu Hong

When MEMS is scaled down to nanometers, the surface effects become more and more obvious, among which the influence of adsorption is a main aspect. The paper deals with the problem of the influence of adsorption on resonators in NEMS, based on three basics of adsorption theory. It shows that the change of frequency induced by the adsorption increases with the decrease of cantilever dimensions.

Published in:

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on  (Volume:3 )

Date of Conference:

18-21 Oct. 2004