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Analysis of optimized micro-rotating-structure for MEMS

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3 Author(s)
Zutao Liu ; Key Lab. of MEMS, Southeast Univ., Nanjing, China ; Qing-An Huang ; Weihua Li

The paper presents an optimized micro-rotating structure for local measurement of residual strain in a thin film. The structure is composed of two actuating beams and an indicating beam. An analytical model is derived to relate the measured displacement to the residual strain of the thin film. Finite-element modeling is also used to confirm the model.

Published in:

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on  (Volume:3 )

Date of Conference:

18-21 Oct. 2004