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A high-performance strain sensing microsystem with remote RF power capability

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2 Author(s)
Young, D.J. ; EECS Dept., Case Western Reserve Univ., Cleveland, OH, USA ; Ko, W.H.

This paper describes a high-performance strain sensing microsystem with a remote RF powering capability. A MEMS capacitive strain sensor converts an input strain to a capacitance change with a sensitivity of 26.5 aF per 0.1 με. Low-noise integrated sensing electronics, employing a continuous time synchronous detection architecture, convert the capacitive signal to an output voltage for further signal processing. An RF to DC converter, based on inductive coupled coils, converts a 50 MHz AC signal to a stable DC supply of 2.8 V with a current driving capability of 2 mA, sufficient to power the interface sensing electronics. The prototype microsystem achieves a minimum detectable strain of 0.09 με over a 10 kHz bandwidth with a dynamic range of 81 dB. The sensing electronics consume 1.5 mA from a 2.8 V supply.

Published in:

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on  (Volume:3 )

Date of Conference:

18-21 Oct. 2004