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Tunable RF MEMS elements

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1 Author(s)
Tien, N.C. ; Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA

A review of some of the work in tunable RF MEMS elements is presented. Discussed are a high-tuning range variable capacitor, a tunable microinductor, a switched inductor array and a MEMS capacitor immersed in a dielectric fluid. These devices expand the types of devices available to the RF designer for enhanced RF circuits.

Published in:

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on  (Volume:3 )

Date of Conference:

18-21 Oct. 2004

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